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TR 2017/179: GLC 190mm Gamma DPTE-BetaBag Design Verification and Validation Summary RU Aluminum Seals

This report summarizes packaging design verification, process validation, use-by-date, and process control information.
This Technical Report provides an overview of the design verification and process validation of the GLC 190 mm DPTE BetaBag packaging system, as well as the packaging and process control strategy.

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